Zygo Corporation Receives Multiple Orders for Semiconductor Process Metrology Systems

Zygo Corporation (NASDAQ: ZIGO), a leading worldwide optical metrology supplier, today announced that it received follow-on orders for five CP300i advanced metrology systems from a major customer in the semiconductor industry. These systems are scheduled for shipment within the next two quarters. The Company had previously shipped seven identical systems.

The CP300i is the latest in ZYGO's established line of automated ultra high precision optical surface profilers. It uses proprietary optical imaging and analysis techniques which enable engineers and operators to measure 2- and 3-dimensional structures on 300 mm wafers and chip packages at high speed, and with subnanometer precision. These techniques were recently developed by ZYGO specifically to enable its customers in the semiconductor and flat panel display industries to perform complex process control measurements of parameters, such as film thickness, pattern overlay, and step height. The systems are deployed in 24/7 production facilities around the world.

Robert Stoner, ZYGO's vice president, metrology, made the following comment, "ZYGO has long been a successful OEM supplier of precision optical measuring systems to stepper manufacturers. The CP300i is our way of introducing key customers in the semiconductor end user market to ZYGO. It is the first of several novel instruments we plan to develop and release into this market over the next three years. These multi-tool orders signal the beginning of what we believe will be an important new growth opportunity for the Company."

Zygo Corporation (NASDAQ: ZIGO), headquartered in Middlefield, Connecticut, is a worldwide supplier of optical metrology instruments, precision optics, and electro-optical design and manufacturing services, serving customers in the semiconductor capital equipment and industrial markets. See ZYGO's web site at www.zygo.com for additional information.

All statements other than statements of historical fact included in this news release regarding our financial position, business strategy, plans, anticipated growth rates, and objectives of management of the Company for future operations are forward-looking statements. Forward-looking statements are intended to provide management's current expectations or plans for the future operating and financial performance of the Company based upon information currently available and assumptions currently believed to be valid. Forward-looking statements can be identified by the use of words such as "anticipate," "believe," "estimate," "expect," "intend," "plans," "strategy," "project," and other words of similar meaning in connection with a discussion of future operating or financial performance. Actual results could differ materially from those contemplated by the forward-looking statements as a result of certain factors. Among the important factors that could cause actual events to differ materially from those in the forward-looking statements are fluctuations in capital spending of our customers, fluctuations in net sales to our major customer, manufacturing and supplier risks, dependence on new product development, rapid technological and market change, risks in international operations, dependence on proprietary technology and key personnel, length of the sales cycle, environmental regulations, and stock price. Further information on potential factors that could affect Zygo Corporation's business is described in our reports on file with the Securities and Exchange Commission, including our Form 10-K for the fiscal year ended June 30, 2005.

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